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Fully Automatic Wafer Splitter

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Fully Automatic Wafer Splitter
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Fully Automatic Wafer Splitter

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Features: 

» This equipment is mainly developed for GPP wafers as an automatic splitting device; it is equipped with automatic loading and unloading, Z-axis pressure sensing, visual angle correction, double-wafer detection, and automatic liquid spraying functions; » The equipment has high mechanical yield and fast splitting
efficiency ;
» Full Chinese operation interface, intuitive and simple operation, good interface;
» Process parameters can be stored and retrieved, easy to operate;
» Pressure value sensing, graph display;
» Automatic draining system.

 

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Specifications: 

 

technical specifications Wafer Breaker
processing speed 100-120pcs/H
Field of application After the wafer is half-cut and diced, it is broken into loose particles
Loading and unloading method Fully automatic module
control method software
Pressure control ±2.5N
Correction method CCD
Correction accuracy ±0.4°
Yield rate ≥99.5%
Splinter Roller Hardness ≤90HRC
Cushion thickness ≥5mm
Scribing speed 250mm/s-300mm/s
cutting depth ≤120um
Counterpoint template matching
visual processing Binarization
X\Y axis moving range 140mm
θ axis 270 deg
platform level 5-15um
laser Raycus 30W/IPG20, 30W

 

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Company address

No. 66, Tonghe Road, Weiting Town, Suzhou Industrial Park

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