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Automatic loading and unloading laser wafer slotting equipment

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Automatic loading and unloading laser wafer slotting equipment
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Automatic loading and unloading laser wafer slotting equipment

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Features: 

 

» Fully automatic loading and unloading, automatic alignment, fast scribing speed, high efficiency, and reduced chipping rate »
Non-contact processing, no mechanical stress, high chip quality
» CCD fast positioning function, double-sided CCD recognition function can be upgraded
» High precision Two-dimensional linear motion platform, high-precision DD rotary platform
» Marble base, stable and reliable, small thermal deformation
» Cross alignment line marking function on the back of the wafer
» Equipped with automatic splitting equipment, easy to operate and high efficiency

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Specifications: 

 

Device model TH-8211 TH-8212
laser type Ultraviolet UV Ultraviolet UV
Laser wavelength 355nm 355nm
laser power 10w/15w/30w 10w/15w/30w
Maximum Processed Wafer Size 5 inches (compatible with 6 inches) 5 inches (compatible with 6 inches)
Scribing speed 1000/1500/3000mm/s 50/80/100mm/s
line width 150-300μm 20-40μm
Line depth < 10μm (depending on material) < 120μm (depending on material)
System positioning accuracy ±5μm ±5μm
Repeatability ±2μm ±2μm
Laser service life 12,000 hours 12,000 hours
Machine Dimensions 1260*1160*1820mm 1260*1160*1820mm
Total Weight 1500kg 1500kg

 

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Company address

No. 66, Tonghe Road, Weiting Town, Suzhou Industrial Park

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Douyin

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